SuperView W1 for Nano 3D Surface and Form

Technical Parameters

Model SuperView W1
Light source Green LED
Video System 1024 x 1024
Optical Lens 10X, 50X, (Optional 2.5X, 5X, 20X, 100X)
Optical Zoom 1X (Optional 0.5X, 0.75X)
Lens Holder 3 holes-manual
Software XtremeVision
XY Object Table Size 320 x 200mm
Moving Range 140 x 110mm(Customization is supported)
Loading Capacity 10kg
Control Method Motorized
Tilt ±5° Manual
Travel range of Z-Axis 100mm Motorized
Scanning range of Z-Axis 10mm
Resolution of Z-Axis 0.1nm
Reflectivity of test object 0.05%~100%
Stage Measurement Accuracy Repeatability
0.70% 0.1% 1σ

Lens Parameters

Optical Lens 2.5X 5X 10X 20X 50X 100X
Numerical Hole Diameter 0.075 0.13 0.3 0.4 0.55 0.7
Optical Resolution @550nm (µm) 3.7 2.1 0.92 0.69 0.5 0.4
Focusing Depth (µm) 48.6 16.2 3.04 1.71 0.9 0.56
Working Distance (mm) 10.3 9.3 7.4 4.7 3.4 2
Field H x V (mm) Video System 1024 x 1024 0.5X 3.84 x 3.84 1.92 x 1.92 0.96 x 0.96 0.48 x 0.48 0.192 x 0.192 0.096 x 0.096
0.75X 2.56 x 2.56 1.28 x 1.28 0.64 x 0.64 0.32 x 0.32 0.128 x 0.128 0.064 x 0.064
1.0X 1.92 x 1.92 0.96 x 0.96 0.48 x 0.48 0.24 x 0.24 0.096 x 0.096 0.048 x 0.048

Standard Configuration

1. Host machine 1pc
2. Objective lens:10X 1pc
3. X Y object table: Auto-moving object table 1pc
4. Video system: 1024*1024 pixels
5. Optical zoom: 0.5X 1pc
6. Roughness setting gauge 1set
7. Joystick 1pc
8. Desktop computer and monitor 1set
9. XtremeVision software 1set
10. Electrical control cabinet 1pc
11. Portable inflating pump 1set
12. Accessory suitcase 1pc

Optional Configuration
1. Objective lens:2.5×, 5×, 20×, 50×, 100×
2. Optical zoom:0.75X, 1X
3. Vacuum object table(dedicated for wafer IC)
4. Motorized 5 holes lens holder

SKU: W1 Category: Tag: