Technical Parameters
| Model | SuperView W1 | ||
| Light source | Green LED | ||
| Video System | 1024 x 1024 | ||
| Optical Lens | 10X, 50X, (Optional 2.5X, 5X, 20X, 100X) | ||
| Optical Zoom | 1X (Optional 0.5X, 0.75X) | ||
| Lens Holder | 3 holes-manual | ||
| Software | XtremeVision | ||
| XY Object Table | Size | 320 x 200mm | |
| Moving Range | 140 x 110mm(Customization is supported) | ||
| Loading Capacity | 10kg | ||
| Control Method | Motorized | ||
| Tilt | ±5° Manual | ||
| Travel range of Z-Axis | 100mm Motorized | ||
| Scanning range of Z-Axis | 10mm | ||
| Resolution of Z-Axis | 0.1nm | ||
| Reflectivity of test object | 0.05%~100% | ||
| Stage Measurement | Accuracy | Repeatability | |
| 0.70% | 0.1% 1σ | ||
Lens Parameters
| Optical Lens | 2.5X | 5X | 10X | 20X | 50X | 100X | ||
| Numerical Hole Diameter | 0.075 | 0.13 | 0.3 | 0.4 | 0.55 | 0.7 | ||
| Optical Resolution @550nm (µm) | 3.7 | 2.1 | 0.92 | 0.69 | 0.5 | 0.4 | ||
| Focusing Depth (µm) | 48.6 | 16.2 | 3.04 | 1.71 | 0.9 | 0.56 | ||
| Working Distance (mm) | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2 | ||
| Field H x V (mm) | Video System 1024 x 1024 | 0.5X | 3.84 x 3.84 | 1.92 x 1.92 | 0.96 x 0.96 | 0.48 x 0.48 | 0.192 x 0.192 | 0.096 x 0.096 |
| 0.75X | 2.56 x 2.56 | 1.28 x 1.28 | 0.64 x 0.64 | 0.32 x 0.32 | 0.128 x 0.128 | 0.064 x 0.064 | ||
| 1.0X | 1.92 x 1.92 | 0.96 x 0.96 | 0.48 x 0.48 | 0.24 x 0.24 | 0.096 x 0.096 | 0.048 x 0.048 | ||
Standard Configuration
| 1. Host machine | 1pc |
| 2. Objective lens:10X | 1pc |
| 3. X Y object table: Auto-moving object table | 1pc |
| 4. Video system: 1024*1024 pixels | |
| 5. Optical zoom: 0.5X | 1pc |
| 6. Roughness setting gauge | 1set |
| 7. Joystick | 1pc |
| 8. Desktop computer and monitor | 1set |
| 9. XtremeVision software | 1set |
| 10. Electrical control cabinet | 1pc |
| 11. Portable inflating pump | 1set |
| 12. Accessory suitcase | 1pc |
Optional Configuration
1. Objective lens：2.5×, 5×, 20×, 50×, 100×
2. Optical zoom：0.75X, 1X
3. Vacuum object table(dedicated for wafer IC)
4. Motorized 5 holes lens holder